Stabilizing the frequency of nanomechanical resonances using thermally invariant voltage engineering

Abstract image

Microfabricated mechanical resonators make it possible to measure quantum programs developed from microscopy of atomic force of precision technology. Physical sensation based on resonant frequency combines high accuracy with long-lasting stability. However, Si is widely used3N.4 Resonators experience frequency sensitivity to temperature due to differential thermal expansion as a Si substrate. Here we experimentally demonstrate the temperature and residual stress-sensitive 16.51 MHz fork nanoparticle resonance with non-linear clamps that determine stress and frequency by design, achieving low-frequency frequency sensitivity (2.5 ± 0.8) × 10–6 K.–1, Reduction 72. Oncological optical reading of resonator thermomechanical oscillations allows precision measurement without precision measurement, without any external excitation, with thermodynamically limited frequency, Alan deviation1/2 And (relative) bias with stability up to ≈10 Hz (≈ 0.6 × 10).–6) Average above 1, especially with modern push devices of similar mass. Stabilizing the resonator and removing the passive frequency can take advantage of a variety of micromechanical sensors.